octafluorocyclobutane

Questions

What does octafluorocyclobutane mean?

The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.

Where does octafluorocyclobutane come from?

From octa- + fluoro- + cyclobutane.

How to pronounce octafluorocyclobutane

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